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1.
Inorg Chem ; 2024 May 14.
Artículo en Inglés | MEDLINE | ID: mdl-38743640

RESUMEN

Enzyme immobilization within metal-organic frameworks (MOFs) is a promising solution to avoid denaturation and thereby utilize the desirable properties of enzymes outside of their native environments. The biomimetic mineralization strategy employs biomacromolecules as nucleation agents to promote the crystallization of MOFs in water at room temperature, thus overcoming pore size limitations presented by traditional postassembly encapsulation. Most biomimetic crystallization studies reported to date have employed zeolitic imidazole frameworks (ZIFs). Herein, we expand the library of MOFs suitable for biomimetic mineralization to include zinc(II) MOFs incorporating functionalized terephthalic acid linkers and study the catalytic performance of the enzyme@MOFs. Amine functionalization of terephthalic acids is shown to accelerate the formation of crystalline MOFs enabling new enzyme@MOFs to be synthesized. The structure and morphology of the enzyme@MOFs were characterized by PXRD, FTIR, and SEM-EDX, and the catalytic potential was evaluated. Increasing the linker length while retaining the amino moiety gave rise to a family of linkers; however, MOFs generated with the 2,2'-aminoterephthalic acid linker displayed the best catalytic performance. Our data also illustrate that the pH of the reaction mixture affects the crystal structure of the MOF and that this structural transformation impacts the catalytic performance of the enzyme@MOF.

2.
J Am Chem Soc ; 146(15): 10367-10380, 2024 Apr 17.
Artículo en Inglés | MEDLINE | ID: mdl-38569081

RESUMEN

Comparison of bonding and electronic structural features between trivalent lanthanide (Ln) and actinide (An) complexes across homologous series' of molecules can provide insights into subtle and overt periodic trends. Of keen interest and debate is the extent to which the valence f- and d-orbitals of trivalent Ln/An ions engage in covalent interactions with different ligand donor functionalities and, crucially, how bonding differences change as both the Ln and An series are traversed. Synthesis and characterization (SC-XRD, NMR, UV-vis-NIR, and computational modeling) of the homologous lanthanide and actinide N-heterocyclic carbene (NHC) complexes [M(C5Me5)2(X)(IMe4)] {X = I, M = La, Ce, Pr, Nd, U, Np, Pu; X = Cl, M = Nd; X = I/Cl, M = Nd, Am; and IMe4 = [C(NMeCMe)2]} reveals consistently shorter An-C vs Ln-C distances that do not substantially converge upon reaching Am3+/Nd3+ comparison. Specifically, the difference of 0.064(6) Å observed in the La/U pair is comparable to the 0.062(4) Å difference observed in the Nd/Am pair. Computational analyses suggest that the cause of this unusual observation is rooted in the presence of π-bonding with the valence d-orbital manifold in actinide complexes that is not present in the lanthanide congeners. This is in contrast to other documented cases of shorter An-ligand vs Ln-ligand distances, which are often attributed to increased 5f vs 4f radial diffusivity leading to differences in 4f and 5f orbital bonding involvement. Moreover, in these traditional observations, as the 5f series is traversed, the 5f manifold contracts such that by americium structural studies often find no statistically significant Am3+vs Nd3+ metal-ligand bond length differences.

3.
Chem Mater ; 36(4): 1957-1965, 2024 Feb 27.
Artículo en Inglés | MEDLINE | ID: mdl-38435049

RESUMEN

Rare-earth (RE) metal-organic frameworks (MOFs) synthesized in the presence of fluorine-donating modulators or linkers are an important new subset of functional MOFs. However, the exact nature of the REaXb core of the molecular building block (MBB) of the MOF, where X is a µ2 or 3-bridging group, remains unclear. Investigation of one of the archetypal members of this family with the stable fcu framework topology, Y-fum-fcu-MOF (1), using a combination of experimental techniques, including high-field (20 T) solid-state nuclear magnetic resonance spectroscopy, has determined two sources of framework disorder involving the µ3-X face-capping group of the MBB and the fumarate (fum) linker. The core of the MBB of 1 is shown to contain a mixture of µ3-F- and (OH)- groups with preferential occupation at the crystallographically different face-capping sites that result in different internally lined framework tetrahedral cages. The fum linker is also found to display a disordered arrangement involving bridging- or chelating-bridging bis-bidentate modes over the fum linker positions without influencing the MBB orientation. This linker disorder will, upon activation, result in the creation of Y3+ ions with potentially one or two additional uncoordinated sites possessing differing degrees of Lewis acidity. Crystallographically determined host-guest relationships for simple sorbates demonstrate the favored sorption sites for N2, CO2, and CS2 molecules that reflect the chemical nature of both the framework and the sorbate species with the structural partitioning of the µ3-groups apparent in determining the favored sorption site of CS2. The two types of disorder found within 1 demonstrate the complexity of fluoride-containing RE-MOFs and highlight the possibility to tune this and other frameworks to contain different proportions and segregations of µ3-face-capping groups and degrees of linker disorder for specifically tailored applications.

4.
Inorg Chem ; 2024 Feb 15.
Artículo en Inglés | MEDLINE | ID: mdl-38359351

RESUMEN

Dysprosium complexes with strong axial crystal fields are promising candidates for single-molecule magnets (SMMs), which could be used for high-density data storage. Isolated dysprosocenium cations, [Dy(CpR)2]+ (CpR = substituted cyclopentadienyl), have recently shown magnetic hysteresis (a memory effect) above the temperature of liquid nitrogen. Synthetic efforts have focused on reducing strong transverse ligand fields in these systems as they are known to enhance magnetic relaxation by spin-phonon mechanisms. Here we show that equatorial coordination of the halobenzenes PhX (X = F, Cl, Br) and o-C6H4F2 to the cation of a recently reported dysprosocenium complex [Dy(Cpttt)(Cp*)][Al{OC(CF3)3}4] (Cpttt = C5H2tBu3-1,2,4; Cp* = C5Me5) reduces magnetic hysteresis temperatures compared to that of the parent cation. We find that this is due to increased effectiveness of both one- (Orbach) and two-phonon (Raman) relaxation mechanisms, which correlate with the electronegativity and number of interactions with the halide despite κ1-coordination of a single halobenzene having a minimal effect on the metrical parameters of [Dy(Cpttt)(Cp*)(PhX-κ1-X)]+ cations vs the isolated [Dy(Cpttt)(Cp*)]+ cation. We observe unusual divergent behavior of relaxation rates at low temperatures in [Dy(Cpttt)(Cp*)(PhX)][Al{OC(CF3)3}4], which we attribute to a phonon bottleneck effect. We find that, despite the transverse fields introduced by the monohalobenzenes in these cations, the interactions are sufficiently weak that the effective barriers to magnetization reversal remain above 1000 cm-1, being only ca. 100 cm-1 lower than for the parent complex, [Dy(Cpttt)(Cp*)][Al{OC(CF3)3}4].

5.
Inorg Chem ; 2024 Feb 21.
Artículo en Inglés | MEDLINE | ID: mdl-38382535

RESUMEN

The decamethyldysprosocenium cation, [Dy(Cp*)2]+ (Cp* = {C5Me5}), was a target single-molecule magnet (SMM) prior to the isolation of larger dysprosocenium cations, which have recently shown magnetic memory effects up to 80 K. However, the relatively short Dy···Cp*centroid distances of [Dy(Cp*)2]+, together with the reduced resonance of its vibrational modes with electronic states compared to larger dysprosocenium cations, could lead to more favorable SMM behavior. Here, we report the synthesis and magnetic properties of a series of solvated adducts containing bis-halobenzene decamethyldysprosocenium cations, namely [Dy(Cp*)2(PhX-κ-X)2][Al{OC(CF3)3}4] (X = F or Cl) and [Dy(Cp*)2(C6H4F2-κ2-F,F)(C6H4F2-κ-F)][Al{OC(CF3)3}4]. These complexes were prepared by the sequential reaction of [Dy(Cp*)2(µ-BH4)]∞ with allylmagnesium chloride and [NEt3H][Al{OC(CF3)3}4], followed by recrystallization from parent halobenzenes. The complexes were characterized by powder and single crystal X-ray diffraction, NMR and ATR-IR spectroscopy, elemental analysis, and SQUID magnetometry; experimental data were rationalized by a combination of density functional theory and ab initio calculations. We find that bis-halobenzene adducts of the [Dy(Cp*)2]+ cation exhibit highly bent Cp*···Dy···Cp* angles; these cations are also susceptible to decomposition by C-X (X = F, Cl, Br) activation and displacement of halobenzenes by O-donor ligands. The effective energy barrier to reversal of magnetization measured for [Dy(Cp*)2(PhF-κ-F)2][Al{OC(CF3)3}4] (930(6) cm-1) sets a new record for SMMs containing {Dy(Cp*)2} fragments, though all SMM parameters are lower than would be predicted for an isolated [Dy(Cp*)2]+ cation, as expected due to transverse ligand fields introduced by halobenzenes and the large deviation of the Cp*···Dy···Cp* angle from linearity promoting magnetic relaxation.

6.
J Am Chem Soc ; 146(5): 3331-3342, 2024 Feb 07.
Artículo en Inglés | MEDLINE | ID: mdl-38282511

RESUMEN

The isolation of formally two-coordinate lanthanide (Ln) complexes is synthetically challenging, due to predominantly ionic Ln bonding regimes favoring high coordination numbers. In 2015, it was predicted that a near-linear dysprosium bis(amide) cation [Dy{N(SiiPr3)2}2]+ could provide a single-molecule magnet (SMM) with an energy barrier to magnetic reversal (Ueff) of up to 2600 K, a 3-fold increase of the record Ueff for a Dy SMM at the time; this work showed a potential route to SMMs that can provide high-density data storage at higher temperatures. However, synthetic routes to a Dy complex containing only two monodentate ligands have not previously been realized. Here, we report the synthesis of the target bent dysprosium bis(amide) complex, [Dy{N(SiiPr3)2}2][Al{OC(CF3)3}4] (1-Dy), together with the diamagnetic yttrium analogue. We find Ueff = 950 ± 30 K for 1-Dy, which is much lower than the predicted values for idealized linear two-coordinate Dy(III) cations. Ab initio calculations of the static electronic structure disagree with the experimentally determined height of the Ueff barrier, thus magnetic relaxation is faster than expected based on magnetic anisotropy alone. We propose that this is due to enhanced spin-phonon coupling arising from the flexibility of the Dy coordination sphere, in accord with ligand vibrations being of equal importance to magnetic anisotropy in the design of high-temperature SMMs.

7.
Inorg Chem Front ; 10(23): 6945-6952, 2023 Nov 21.
Artículo en Inglés | MEDLINE | ID: mdl-38021441

RESUMEN

Here we report the synthesis and structural characterization of four [7]rotaxanes formed by coordinating hybrid inorganic-organic [2]rotaxanes to a central {Ni12} core. X-ray single crystal diffraction demonstrate that [7]rotaxanes are formed, with a range of conformations in the crystal. Small angle X-ray scattering supported by molecular dynamic simulations demonstrates that the large molecules are stable in solution and also show that the conformers present in solution are not those found in the crystal. Pulsed EPR spectroscopy show that phase memory times for the {Cr7Ni} rings, which have been proposed as qubits, are reduced but not dramatically by the presence of the {Ni12} cage.

8.
Dalton Trans ; 52(41): 15131, 2023 Oct 24.
Artículo en Inglés | MEDLINE | ID: mdl-37815825

RESUMEN

Correction for 'Synthesis and characterization of heterometallic rings templated through alkylammonium or imidazolium cations' by Rajeh Alotaibi et al., Dalton Trans., 2023, 52, 7473-7481, https://doi.org/10.1039/D3DT00982C.

9.
J Am Chem Soc ; 145(41): 22814-22825, 2023 Oct 18.
Artículo en Inglés | MEDLINE | ID: mdl-37797311

RESUMEN

Isolated dysprosocenium cations, [Dy(CpR)2]+ (CpR = substituted cyclopentadienyl), have recently been shown to exhibit superior single-molecule magnet (SMM) properties over closely related complexes with equatorially bound ligands. However, gauging the crossover point at which the CpR substituents are large enough to prevent equatorial ligand binding, but small enough to approach the metal closely and generate strong crystal field splitting has required laborious synthetic optimization. We therefore created the computer program AtomAccess to predict the accessibility of a metal binding site and its ability to accommodate additional ligands. Here, we apply AtomAccess to identify the crossover point for equatorial coordination in [Dy(CpR)2]+ cations in silico and hence predict a cation that is at the cusp of stability without equatorial interactions, viz., [Dy(Cpttt)(Cp*)]+ (Cpttt = C5H2tBu3-1,2,4, Cp* = C5Me5). Upon synthesizing this cation, we found that it crystallizes as either a contact ion-pair, [Dy(Cpttt)(Cp*){Al[OC(CF3)3]4-κ-F}], or separated ion-pair polymorph, [Dy(Cpttt)(Cp*)][Al{OC(CF3)3}4]·C6H6. Upon characterizing these complexes, together with their precursors, yttrium and yttrium-doped analogues, we find that the contact ion-pair shows inferior SMM properties to the separated ion-pair, as expected, due to faster Raman and quantum tunneling of magnetization relaxation processes, while the Orbach region is relatively unaffected. The experimental verification of the predicted crossover point for equatorial coordination in this work tests the limitations of the use of AtomAccess as a predictive tool and also indicates that the application of this type of program shows considerable potential to boost efficiency in exploratory synthetic chemistry.

10.
Chemistry ; 29(69): e202302360, 2023 Dec 11.
Artículo en Inglés | MEDLINE | ID: mdl-37737455

RESUMEN

A synthetic strategy is demonstrated to prepare two distinct trimers of antiferromagnetically coupled {Cr7 Ni} rings, substantially varying the magnetic interactions between the spin centres. The interactions were studied using multi-frequency cw EPR: in a trimer linked via non-covalent H-bonding interactions no measurable interaction between rings was seen, while in a trimer linked via iso-nicotinate groups isotropic and anisotropic exchange interactions of +0.42 and -0.8 GHz, respectively, were observed. The latter are the same as those for a simpler hetero-dimer system, showing how the spin-spin interactions can be built in a predictable and modular manner in these systems.

11.
Beilstein J Org Chem ; 19: 1289-1298, 2023.
Artículo en Inglés | MEDLINE | ID: mdl-37701304

RESUMEN

Organic thermally activated delayed fluorescence (TADF) materials have been widely investigated due to their impressive electronic properties and applied potential for the third generation of organic light-emitting diodes (OLED). We present organic TADF material (4BGIPN) based on the strained benzoguanidine donor and compare it with the benchmark carbazole-based material (4CzIPN). Extended π-conjugation in 4BGIPN material results in yellow-green luminescence at 512 nm with a fast radiative rate of 5.5 × 10-5 s-1 and a photoluminescence quantum yield of 46% in methylcyclohexane solution. Such a nitrogen-rich 4BGIPN material has a significantly stabilized highest occupied molecular orbital (HOMO) at -6.4 eV while the lowest unoccupied molecular orbital (LUMO) at -4.0 eV, indicating potential suitability for application as the electron transport layer or TADF class III emitter in OLEDs.

12.
Dalton Trans ; 52(38): 13787-13796, 2023 Oct 03.
Artículo en Inglés | MEDLINE | ID: mdl-37721024

RESUMEN

Despite p-block clusters being known for over a century, their application as catalysts to mediate organic transformations is underexplored. Here, the boron functionalized [P7] cluster [(BBN)P7]2- ([1]2-; BBN = 9-borabicyclo[3.3.1]nonane) is applied in the dearomatized reduction of pyridines, as well as the hydroboration of imines and nitriles. These transformations afford amine products, which are important precursors to pharmaceuticals, agrochemicals, and polymers. Catalyst [1]2- has high stability in these reductions: recycling nine times in quinoline hydroboration led to virtually no loss in catalyst performance. The catalyst can also be recycled between two different organic transformations, again with no loss in catalyst competency. The mechanism for pyridine reduction was probed experimentally using variable time normalization analysis, and computationally using density functional theory. This work demonstrates that Zintl clusters can mediate the reduction of nitrogen containing substrates in a transition metal-free manner.

13.
Angew Chem Int Ed Engl ; 62(38): e202307841, 2023 Sep 18.
Artículo en Inglés | MEDLINE | ID: mdl-37429824

RESUMEN

Relaying conformational change over several nanometers is central to the function of allosterically regulated proteins. Replicating this mechanism artificially would provide important communication tools, but requires nanometer-sized molecules that reversibly switch between defined shapes in response to signaling molecules. In this work, 1.8 nm long rigid rod oligo(phenylene-ethynylene)s are scaffolds for switchable multi-squaramide hydrogen-bond relays. Each relay can adopt either a parallel or an antiparallel orientation relative to the scaffold; the preferred orientation is dictated by a director group at one end. An amine director responded to proton signals, with acid-base cycles producing multiple reversible changes in relay orientation that were reported by a terminal NH, which is 1.8 nm distant. Moreover, a chemical fuel acted as a dissipative signal. As the fuel was consumed, the relay reverted to its original orientation, illustrating how information from out-of-equilibrium molecular signals can be communicated to a distant site.

14.
Dalton Trans ; 52(22): 7473-7481, 2023 Jun 06.
Artículo en Inglés | MEDLINE | ID: mdl-37194350

RESUMEN

We report the synthesis and structural characterization of a series of heterometallic rings templated via alkylammonium or imidazolium cations. The template and preference of each metal's coordination geometry can control the structure of heterometallic compounds, leading to octa-, nona-, deca-, dodeca-, and tetradeca-metallic rings. The compounds were characterized by single-crystal X-ray diffraction, elemental analysis, magnetometry, and EPR measurements. Magnetic measurements show that the exchange coupling between metal centres is antiferromagnetic. EPR spectroscopy shows that the spectra of {Cr7Zn} and {Cr9Zn} have S = 3/2 ground states, while the spectra of {Cr12Zn2} and {Cr8Zn} are consistent with S = 1 and 2 excited states. The EPR spectra of {(ImidH)-Cr6Zn2}, {(1-MeImH)-Cr8Zn2}, and {(1,2-diMeImH)-Cr8Zn2} include a combination of linkage isomers. The results on these related compounds allow us to examine the transferability of magnetic parameters between compounds.

15.
Org Lett ; 25(13): 2196-2200, 2023 Apr 07.
Artículo en Inglés | MEDLINE | ID: mdl-36972327

RESUMEN

Reactions of a glucuronic acid (GlcA) ß-thioglycoside with cyclohexadione show initial formation of the two anticipated all-trans decalin-type O2,O3 and O3,O4 cyclohexane-1,2-diacetals (CDAs) along with an epimer of the main O2,O3 acetal. This trans-cis isomer is then interconverted leading to higher amounts of the two all-trans products. Isomerization studies indicate slow interconversion between the all-trans CDA acetals, with only one undergoing significant interconversion with the minor 2,3-diastereomer. Crystal structures of all three isomers are included. These findings are relevant to other uses of CDA protections where occurrence of apparently disfavored isomers may be occurring, along with interconversions between CDA isomers.

16.
Adv Sci (Weinh) ; 10(14): e2204488, 2023 May.
Artículo en Inglés | MEDLINE | ID: mdl-36951493

RESUMEN

High-entropy (HE) metal chalcogenides are a class of materials that have great potential in applications such as thermoelectrics and electrocatalysis. Layered 2D transition-metal dichalcogenides (TMDCs) are a sub-class of high entropy metal chalcogenides that have received little attention to date as their preparation currently involves complicated, energy-intensive, or hazardous synthetic steps. To address this, a low-temperature (500 °C) and rapid (1 h) single source precursor approach is successfully adopted to synthesize the hexernary high-entropy metal disulfide (MoWReMnCr)S2 . (MoWReMnCr)S2 powders are characterized by powder X-ray diffraction (pXRD) and Raman spectroscopy, which confirmed that the material is comprised predominantly of a hexagonal phase. The surface oxidation states and elemental compositions are studied by X-ray photoelectron spectroscopy (XPS) whilst the bulk morphology and elemental stoichiometry with spatial distribution is determined by scanning electron microscopy (SEM) with elemental mapping information acquired from energy-dispersive X-ray (EDX) spectroscopy. The bulk, layered material is subsequently exfoliated to ultra-thin, several-layer 2D nanosheets by liquid-phase exfoliation (LPE). The resulting few-layer HE (MoWReMnCr)S2 nanosheets are found to contain a homogeneous elemental distribution of metals at the nanoscale by high angle annular dark field-scanning transmission electron microscopy (HAADF-STEM) with EDX mapping. Finally, (MoWReMnCr)S2 is demonstrated as a hydrogen evolution electrocatalyst and compared to 2H-MoS2 synthesized using the molecular precursor approach. (MoWReMnCr)S2 with 20% w/w of high-conductivity carbon black displays a low overpotential of 229 mV in 0.5 M  H2 SO4 to reach a current density of 10 mA cm-2 , which is much lower than the overpotential of 362 mV for MoS2 . From density functional theory calculations, it is hypothesised that the enhanced catalytic activity is due to activation of the basal plane upon incorporation of other elements into the 2H-MoS2 structure, in particular, the first row TMs Cr and Mn.

17.
Dalton Trans ; 52(8): 2384-2391, 2023 Feb 21.
Artículo en Inglés | MEDLINE | ID: mdl-36723201

RESUMEN

Despite being known for decades, the solution-state molecular chemistry of heptapnictogen ([Pn7]3-; Pn = P, As) clusters is not well established. Here we study heavy element derivatives of tetrel functionalized heptapnictogen clusters towards heteroallene capture, specifically isocyanates, an isothiocyanate and CO2 are probed. Clusters (Me3Ge)3P7 (1), (Et3Ge)3P7 (2), (nBu3Sn)3P7 (3), and (Me3Si)3As7 (4) were all found to capture isocyanates between all three of their tetrel-pnictogen bonds. In the case of phenyl isocyanate insertion, tetrel coordination at the isocyanate nitrogen atoms is preferred, while in the case of p-toluenesulfonyl isocyanate insertion, tetrel coordination at oxygen is preferred. Furthermore, the reaction of (Me3Si)3P7 with CO2 gave NMR spectra consistent with the capture of the greenhouse gas. Heteroallene insertion at these clusters was also studied using density functional theory.

18.
Chemistry ; 29(21): e202203773, 2023 Apr 13.
Artículo en Inglés | MEDLINE | ID: mdl-36651661

RESUMEN

Controlling aspects of the µ2 -X- bridging anion in the metal-organic framework Ga-MIL-53 [GaX(bdc)] (X- =(OH)- or F- , bdc=1, 4-benzenedicarboxylate) is shown to direct the temperature at which thermally induced breathing transitions of this framework occur. In situ single crystal X-ray diffraction studies reveal that substituting 20 % of (OH)- in [Ga(OH)(bdc)] (1) for F- to produce [Ga(OH)0.8 F0.2 (bdc)] (2) stabilises the large pore (lp) form relative to the narrow pore (np) form, causing a well-defined decrease in the onset of the lp to np transition at higher temperatures, and the adsorption/desorption of nitrogen at lower temperatures through np to lp to intermediate (int) pore transitions. These in situ diffraction studies have also yielded a more plausible crystal structure of the int-[GaX(bdc)] ⋅ H2 O phases and shown that increasing the heating rate to a flash heating regime can enable the int-[GaX(bdc)] ⋅ H2 O to lp-[GaX(bdc)] transition to occur at a lower temperature than np-[GaX(bdc)] via an unreported pathway.

19.
Carbohydr Res ; 524: 108744, 2023 Feb.
Artículo en Inglés | MEDLINE | ID: mdl-36706564

RESUMEN

5-O-Protected and 1,2-acetonide-protected D-glucurono-6,3-lactone furanosides were converted into novel furano-glucuronamides through treatment with ammonia. Several O3 protections and O5-deprotection routes afford new primary gluconamide derivatives. However, attempted O3-benzylations of O5-protected intermediates led instead to silyl migration (from O5-TDBMS), competitive N-benzylation or reclosure to the lactone are observed as competing processes. This is not seen the using 5-O-PMB protection which the provides the method of choice for obtaining a fully protection-differentiated glucofuranamide. X-ray crystal structures of a fully-protected glucurono-6,3-lactone lactone and a glucuronamide derivatives are reported.


Asunto(s)
Amidas , Lactonas , Amidas/síntesis química
20.
ACS Appl Nano Mater ; 5(12): 17538-17543, 2022 Dec 23.
Artículo en Inglés | MEDLINE | ID: mdl-36583125

RESUMEN

Metal-organic materials such as [NH2(CH2-CH=CH2)2][Cr7NiF8(Pivalate)16] can act as negative tone resists for electron beam lithography (EBL) with high-resolution patterning of sub-40 nanometer pitch while exhibiting ultrahigh dry etch selectivities >100:1 and giving line dose exposures >11,000 pC/cm. It is clear that the resist sensitivity is too low to be used to manufacture the latest nanoscale photomasks that are suitable for extreme ultraviolet lithography. Therefore, the focus of this work here is to improve the sensitivity of this resist while maintaining its resolution and dry etch selectivity. Using our latest Monte Carlo simulation called Excalibur, we predict that the sensitivity would increase by a factor of 1.4 when the nickel atom is substituted by a cadmium atom. EBL studies showed an excellent agreement with the simulation, and plasma etching studies demonstrated that this did not affect the dry etch performance of the resist which remains very good with a selectively of ca. 99:1 for the etching of silicon at these resolutions with a low sensitivity of 7995 pC/cm.

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